Teaching

Interdisciplinary Microelectronics Processing Lab (PHGN435/535, CBEN435/535, MLGN535)

Updated course material (2018 onwards) can be found on Canvas.

Instructional videos for the equipment used in the course can be found here:

Thermal Evaporator (Angstrom)

Spinner

Developer

Mask Aligner

Curve Tracer

Capacitance Bridge (Boonton)

Hot Point Probe

Silicon Oxide Growth

 

Lift-off

Wet-etch

Sputtering (Orion)

Chemical Safety

Wafer Cleaning

Clean Rooms

Probe Station

IV measurement

4-point probe

Profilometer

Solar Simulator

Ellipsometry 

Reactive Ion Etching (Autoglow)

Dilution Refrigerator Sample Loading